| Final 18:45 | time | | | 1. Armin Hary |  FRG | 10.35s | CR | | 2. Manfred Germar | FRG | 10.4s | | | 3. Peter Radford |  GBR | 10.4s | | | 4. Jocelyn Delecour |  FRA | 10.5s | | | 5. Yuriy Konovalov |  URS | 10.7s | | | 6. Marian Foik |  POL | 10.9s | |
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| History Men 100m | | Championship Record: Osendarp (NED) 10.5s - 1938, Futterer (GER) 10.5s - 1954 |
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Semi-Finals - Wednesday 20.08 15:00 | | First 2 progress to Final |
| Semi 1 | time | | 1. Jocelyn Delecour | FRA | 10.5s | Q | | 2. Marian Foik | POL | 10.7s | Q | | 3. Bjørn Nilsen |  NOR | 10.8s | | | 4. Livio Berruti |  ITA | 10.8s | | | 5. Heinz Müller |  SUI | 10.9s | | | 6. Sven-Olof Westlund |  SWE | 11.0s | |
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| Semi 2 | time | | 1. Peter Radford | GBR | 10.5s | Q | | 2. Armin Hary | FRG | 10.6s | Q | | 3. Constantin Lissenko | FRA | 10.8s | | | 4. Leonid Bartenyev | URS | 10.8s | | | 5. Jan Stesso |  TCH | 11.1s | | | 6. Salvatore Giannone | ITA | 11.1s | |
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| Semi 3 | time | | 1. Manfred Germar | FRG | 10.5s | Q | | 2. Yuriy Konovalov | URS | 10.6s | Q | | 3. Roy Sandstrom | GBR | 10.7s | | | 4. Béla Goldoványi |  HUN | 10.7s | | | 5. Björn Malmroos | SWE | 10.8s | | | 6. Mikhail Bachvarov |  BUL | 10.8s | |
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Heats - Tuesday 19.08 15:10, 17:40 | | First 3 to progress to Semi-Finals. |
| Heat 1 | time | | 1. Manfred Germar | FRG | 10.9s | Q | | 2. Livio Berruti | ITA | 10.9s | Q | | 3. Sven-Olof Westlund | SWE | 11.0s | Q | | 4. Nikolaos Georgopoulos |  GRE | 11.1s | | | 5. Hans Wehrli | SUI | 11.4s | |
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| Heat 2 | time | | 1. Bjørn Nilsen | NOR | 10.8s | Q | | 2. Heinz Müller | SUI | 10.8s | Q | | 3. Roy Sandstrom | GBR | 10.8s | Q | | 4. Jacques Vercruysse |  BEL | 10.9s | | | 5. Edward Szmidt | POL | 11.0s | |
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| Heat 3 | time | | 1. Peter Radford | GBR | 10.6s | Q | | 2. Marian Foik | POL | 10.8s | Q | | 3. Mikhail Bachvarov | BUL | 11.0s | Q | | 4. Václav Janeček | TCH | 11.1s | | | 5. Aydın Onur |  TUR | 11.3s | |
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| Heat 4 | time | | 1. Jocelyn Delecour | FRA | 10.4s | CR Q | | 2. Björn Malmroos | SWE | 10.8s | Q | | 3. Salvatore Giannone | ITA | 10.8s | Q | | 4. Sándor Jakabfy | HUN | 10.9s | | | 5. Richard Schwarzgruber |  AUT | 11.1s | |
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| Heat 5 | time | | 1. Leonid Bartenyev | URS | 11.0s | Q | | 2. Béla Goldoványi | HUN | 11.1s | Q | | 3. Jan Stesso | TCH | 11.2s | Q | | 4. Hilmar Þorbjörnsson |  ISL | 11.3s | | | 5. Peter Rasmussen |  DEN | 11.3s | |
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| Heat 6 | time | | 1. Armin Hary | FRG | 10.7s | Q | | 2. Yuriy Konovalov | URS | 10.7s | Q | | 3. Constantin Lissenko | FRA | 10.9s | Q | | 4. Adolf Huber | AUT | 11.0s | |
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